For the treatment of volatile organic compounds (VOCs) with low concentration and large flow,the traditional treatment technology has some limitations in technology and economy,and can not reach the expected results. Non-thermal plasma (NTP) technology has many advantages in the treatment of VOCs,such as low reactor treatment cost,simple reactor structure,simple operation,wide range of application,mild reaction conditions,which has received widespread attention in recent years. The experimental results show that the degradation of VOCs by single plasma has many problems such as O3,NO2 and organic by-products,which is easy to cause secondary pollution to the environment. The results show that the synergistic catalytic degradation of VOCs by low temperature plasma has significant effect on improving VOCs degradation rate,reducing energy consumption of reaction system and reducing harmful by-products. The NTP collaborative catalytic degradation of VOCs technology in detail was introduced,the influencing factors of NTP collaborative catalytic degradation of VOCs,the influence of different catalytic systems and discharge types on the degradation rate were summarized,and the mechanism of plasma technology and low temperature plasma co-catalytic degradation of VOCs was deduced. The synergistic effect of plasma technology and catalyst catalysis on VOCs degradation was described. Finally,the future development of this technology was prospected. The investigation shows that the current single processing technology is difficult to meet the VOCs processing requirements,a variety of technology coupling methods are widely used at home and abroad. In recent years,the combination of low-temperature plasma technology with catalytic technology plays a significant role in improving the degradation rate of VOCs,reducing the energy consumption of the reaction system and the generation of harmful by-products. This technology has feasibility and research value. At present,the research focuses on the degradation effect of pollutants by the combination mode of catalyst and low-temperature plasma,catalyst type,process parameters and other factors,but the research content is not in-depth. Plasma technology still has the disadvantages of low mineralization rate and many by-products,such as NOx,ozone and other by-products after plasma reaction,forming secondary pollution. In addition,due to the variety of active free radicals in the low-temperature plasma generated by gas discharge and the complex chemical reaction process of VOCs degradation,the synergistic mechanism of low-temperature plasma and catalysis is still unclear,especially the basic molecular dynamics theory of plasma degradation of VOCs remains to be further studied.Therefore,focusd on intrinsically safe and industrial applications,it is necessary to put forward a set of safety evaluation theory,method and tool which is suitable for process characteristics of low temperature plasma cocatalytic governance  of VOCs. And it can be used to develop risk identification and risk evaluation for the whole process system,to identify potential safety hazard,and provide improvement measures,reduce the unreasonable choice and defect in the process design to the greatest extent,and achieves the goal of safe industrial application fundamentally.